Review on Holographic Techniques for Photolithography
نویسندگان
چکیده
Holographic methods utilizing spatial modulators to supplant the covers in photolithographic process. PC produced 3D images got from two pictures with known measurements, reproducing a clear visible field Mask and dark prior mask. The reason for proposal is consider potential outcomes of picture decrease, through holographic based optical segment arrangement, by CGH (Computer-created Hologram). Comprehend decreasing look at acquired. Boundaries, example, complexity, goal least size will be broke down so as decide conceivable progress confinements procedure applied photolithography. It accepted that uniform dainty oppose film can effectively kept on filaments electro-shower covering innovation. Nonetheless, high electronic voltage conductive surface are required current smaller scale structures exposed harm. immediate splash liberated other harm substrates yet it influenced numerous boundaries including arrangement thickness substrate temperature.
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ژورنال
عنوان ژورنال: International journal of new practices in management and engineering
سال: 2022
ISSN: ['2250-0839']
DOI: https://doi.org/10.17762/ijnpme.v11i1s.115